PFLOWC5001
Measuring range [SCCM]
0 to 0.05...20 SLPM
0 to 0.05...20 SLPM
Output signal
Linear, 0.5...4.5 VDC, RS232, Rs485 Modbus
Linear, 0.5...4.5 VDC, RS232, Rs485 Modbus
Accuracy [± % FS] max.
±1 r.d. or ±0.2 f.s whichever is larger
±1 r.d. or ±0.2 f.s whichever is larger
Supply voltage [VDC]
8...24
8...24
Humidity range
0...95% RH, no condensation
0...95% RH, no condensation
Supplier
Angst+Pfister Sensors and Power
Angst+Pfister Sensors and Power
Product description
The PFLOWC5001 series (OEM version) of gas mass flow controllers can be used for general-purpose gas flow monitor and control applications. Additionally, it is compatible to Axetris Massflow Controller.
Data sheet (English) pdfPFLOW5001-PFLOWC5001_1610-21914-0086-E-0224
Technical note (English) pdfTN-THERMAL-TOF_1610-21914-0075-E-0823