PFLOW5001
Measuring range [SCCM]
0 to 0.1...20 SLPM or 0 to ±0.1...±20 SLPM
0 to 0.1...20 SLPM or 0 to ±0.1...±20 SLPM
Output signal
Linear, 0.5...4.5 VDC, Rs485 Modbus, I2C
Linear, 0.5...4.5 VDC, Rs485 Modbus, I2C
Accuracy [± % FS] max.
±1 r.d. or ±0.2 f.s whichever is larger
±1 r.d. or ±0.2 f.s whichever is larger
Supply voltage [VDC]
8...24
8...24
Humidity range
0...95% RH, no condensation
0...95% RH, no condensation
Supplier
Angst+Pfister Sensors and Power
Angst+Pfister Sensors and Power
Product description
MEMS mass flow sensors for manifold configuration
Similar to MFM / MFC 2000 Series; MFM 2020, MFM 2021, MFM 2100, MFC 2022, MFC 2100, MDM2022 etc.
MFM2000, MFC2000, MFM2020, MFM2021, MFM2100, MFC2022, MFC2100, MDM2022
Additionally, it is compatible to Axetris Flow Sensor.
Data sheet (English) pdfPFLOW5001-PFLOWC5001_1610-21914-0086-E-0224
Technical note (English) pdfTN-THERMAL-TOF_1610-21914-0075-E-0823
