New MEMS-based mass flow meters and mass flow controllers:
The new mass flow meters and mass flow controllers from Angst+Pfister Sensors and Power are based on the latest generation of MEMS sensor elements. In addition to the outstanding accuracy and repeatability, the sensor chip is passivated with silicon nitride and coated with nano materials, enabling excellent media resistance. The flow sensors and controllers are available in different versions, ranging from an OEM variant with open electronics and mounting block for manifold assembly through to a complete mass flow controller including housing and Swagelok fittings. The electronic interface is a simple analog output as well as Modbus RS232/RS485 or I2C. Fully customized variants are also available on request.
